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发明名称
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0164499(B1)
申请公布日期
1999.02.01
申请号
KR19950036329
申请日期
1995.10.20
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, CANG-WON;CHOE, KIL-HYUN
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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