| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a dicing apparatus which can easily dress a cutting edge. SOLUTION: A dicing apparatus comprises a dress cassette accommodating portion 32 for accommodating a dress cassette therein other than cassette accommodating portions 34, 36 for accommodating ordinary cassettes therein, respectively. When a cutting edge is dressed, a dress wafer W accommodated in the dress cassette is conveyed to a cutting portion 10 by a conveyer 50. In this way, the cutting edge can be readily dressed.</p> |
