SUBSTRATE DETECTING DEVICE AND SUBSTRATE FEED IN/OUT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate detecting device which is capable of surely detecting a substrate with a simple arrangement, even when a substrate transportation cassette is accommodated in a shielded container, and also to provide a substrate feed in/out apparatus. SOLUTION: A substrate detecting device 5 is provided for detecting the accommodated state of a substrate W in a substrate transfer cassette 1 disposed within a shielded container 4. The device 5 has a plurality of reflecting sensors 6, a sensor support plate 7 for carrying these sensors 6, and an elevating mechanism 8 of a pantagraph-link type for raising and lowering the sensor support plate 7 relative to the cassette 1.