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经营范围
发明名称
PLASMA PROCESSING DEVICE
摘要
申请公布号
JPH11233290(A)
申请公布日期
1999.08.27
申请号
JP19980031539
申请日期
1998.02.13
申请人
NKK CORP
发明人
FUJITA TAICHI;KINOSHITA ATSUSHI
分类号
H05H1/46;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H05H1/46;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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