摘要 |
PROBLEM TO BE SOLVED: To provide a transparent electrode superior scratch resistance and bend resistance and is hardly severed. SOLUTION: When the transparent electrode 4 of a film substrate 3 is formed into a two-layer structure of first and second conductive layers 12, 13, the first conductive layer 12 is made of an indium alloy, thus grains are coarse in the film state, more grain boundaries exist, the elastic coefficient is increased, and bending stress can be absorbed. The second conductive layer 13 is made of a metal oxide of indium oxide, thus grains are finer and more minute than the grains of the first conductive layer 12 in the film state, less grain boundaries exist, electric resistance can be decreased, and the elastic coefficient is reduced due to less grain boundaries of the second conductive layer 13. Since the elastic coefficient of the first conductive layer 12 is large, the first conductive layer 12 is not broken by absorbing bending stress even when cracks or fractures are generated on the second conductive layer 13 by bending stress, thus the transparent electrode 4 can be prevented from breaking.
|