| 摘要 |
<P>PROBLEM TO BE SOLVED: To thin and homogenize a solid oxide electrolyte layer. <P>SOLUTION: A base material 120 is formed of a hydrogen permeable metal, and a ceramic is vapor-deposited on the surface thereof. The ceramic is amorphously deposited by vapor-depositing at a relatively low temperature, and the surface of the amorphous layer 115 is then irradiated and heated with laser beams. At this process, the energy intensity of the laser irradiation is so adjusted that the heating by the laser irradiation does not affect the base material 120. Depending on the energy intensity, a proton conductive layer 110A is allowed to form by crystallizing the entire amorphous layer, or a part in the vicinity of the surface of the amorphous layer 115 is allowed to be crystallized, thereby constituting a layer structure which has the base material 120, an amorphous layer 115 and a proton conductive layer 110. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
