| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical inspection device and method for an electronic component capable of realizing high profile irregularity over a prescribed moving stroke. SOLUTION: An incident beam is made to get incident into a printed wiring board with wiring and an insulator on its surface by a laser beam source 62, the surface is scanned with the incident beam, and fluorescence from the surface of the printed wiring board is detected by a camera unit 50, so as to inspect a defect in a conductive part pattern existing in the surface of the printed wiring board. This optical inspection device 34 for the electronic component includes a base 36, and a mounting table 42 moved relatively along X-directionally with respect to the base 36 and mounted with the printed wiring board, and a material for the base 36, and the mounting table 42 is granite. COPYRIGHT: (C)2005,JPO&NCIPI
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