LASER DRILLING METHOD AND LASER DRILLING DEVICE

摘要

It is provided with a homogeneous optical system 13 for transforming laser light from a laser oscillator 10 into laser light having a linear cross-section and a drive mechanism for synchronously moving a mask 11 and a printed circuit board 12, an irradiation position of the linear laser light being fixed, the drive mechanism moving the mask and the workpiece so that the mask passes through the irradiation position of the laser light while the moving direction thereof is perpendicular to the extending direction of the linear laser light so that the mask is scanned by the linear laser light, the drilling defined by the mask pattern thereby being carried out to the workpiece.