| 摘要 |
PROBLEM TO BE SOLVED: To provide an attaching structure for an optical unit and a length measuring machine main body, capable of regulating easily an inclination of an optical axis of a laser beam with respect to a moving mirror, when attaching the laser interference length measuring machine main body and the optical unit, and to provide the optical unit. SOLUTION: This attaching structure for the optical unit and the length measuring machine main body has an abutting means for making an attaching side of the optical unit 1 abut on an attaching side of the length measuring device main body mutually along an attaching direction, and at least three leg screws 4a, 4b, 4c provided in the attaching side of the optical unit 1 or the attaching side of the length measuring machine main body, wherein the at least two leg screws are adjustable in length in the attaching direction, and the attaching side of the optical unit 1 is made to abut on the attaching side of the length measuring machine main body, by the abutting means, the lengths of the leg screws 4a, 4b, 4c are regulated therein, and the inclination of the laser optical axis 10 is thereby regulated with respect to the moving mirror. COPYRIGHT: (C)2008,JPO&INPIT
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