| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of accurately measuring the pressure. SOLUTION: This pressure sensor 10 for measuring pressure by detecting the frequency of a piezoelectric vibration chip 32 that changes, corresponding to a received pressure is such that the piezoelectric vibration chip 32 is stored in a package 30 having an opening part 40, and the opening part 40 of the package 30 suppresses penetration of steam from the package outside into the inside thereof, and is covered with a permeable covering sheet 60. COPYRIGHT: (C)2008,JPO&INPIT
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