| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high quality gallium nitride based particle in which the particle diameter is small and uniform, and the spread of the particle diameter distribution is small and to provide a method and an apparatus of manufacturing the same. Ž<P>SOLUTION: In the method of manufacturing a gallium nitride based particle by making at least an organic gallium compound and a nitrogen source react, a raw material gas including the organic gallium compound and the nitrogen source is irradiated by laser, and the reaction is performed by making the laser as a heat source. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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