| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ozonizer which is hardly corroded and has high reliability. Ž<P>SOLUTION: The ozonizer comprises a horizontal and tube shape airtight container 21, a cylinder shape electric discharge tube 22 which is arranged in the airtight container and in which one end is closed and a metal film is formed in the inner surface and a ground electrode tube 24 arranged on the concentric circle of the electric discharge tube and via an electric discharge gap 26 outside the electric discharge tube, wherein the circumferential side of the ground electrodes is cooled by cooling water, high voltage is applied to the electric discharge tube 22, and ozone is generated in a raw material gas containing oxygen circulated in the electric discharge gap. The ozonizer is configured such that raw material gas supply pipes 27a, 27b in which two-direction valves 29a, 29b, 32a, 32b are respectively arranged and ozone gas outlet pipes 30a, 30b are each prepared in two places, two flow paths from the raw material gas supply pipe to the ozone gas outlet pipe are prepared, and the flow paths can be changed together by the operation of the two-direction valves. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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