| 摘要 |
PROBLEM TO BE SOLVED: To draw a desired pattern in a plurality of shot regions on a substrate, by means of a plurality of charged particle optical systems.SOLUTION: The control section of a drawing device determines a distance for moving a stage in a direction parallel with the arrangement direction of a plurality of shot regions, so that the plurality of shot regions include a shot region having a drawing area where drawing by at least one first charged particle beam is possible, and drawing by at least one second charged particle beam is possible, and drawing in the shot region having a drawing area where drawing by at least one first charged particle beam is possible, and drawing by at least one second charged particle beam is possible, and controls the drawing operation of the first charged particle optical system and the drawing operation of the second charged particle optical system so as to be performed using any one of the at least one first charged particle beam or at least one second charged particle beam.SELECTED DRAWING: Figure 5 |
