APPARATUS AND METHOD OF PRODUCING POLYCRYSTALLINE SILICON

摘要

According to the present invention, provided is a reactor for manufacturing silicon. The reactor for manufacturing silicon comprises: a vertical reaction pipe with a built-in reaction space; an injection port arranged at the center of the upper side of the reaction pipe to supply a reaction gas into the reaction pipe; a baffle-type structure positioned at the bottom side separated by a fixed distance from the injection port, inducing the received reaction gas to move in a fixed direction; and a heating part arranged at the exterior of the reaction pipe to heat the reaction pipe. The reactor of the present invention can improve conversion efficiency of polysilicon and can increase the amount of obtained polysilicon.