APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS

摘要

The present invention discloses an apparatus for manufacturing a display device and a method for manufacturing the display device, capable of improving productivity of the display device. The apparatus for manufacturing a display device includes: a chamber; a supply pipe for allowing cleaning gas to flow from the outside; a plasma generating unit connected to the supply pipe and converting the cleaning gas into plasma; and a first cooling unit connected to the plasma generating unit and cooling the cleaning gas discharged from the plasma generating unit. The first cooling unit is installed to cover the outer surface of the supply pipe and has a first refrigerant flowing pipe through which refrigerant flows.