METHOD FOR OBTAINING PATTERNS IN A LAYER

摘要

The invention relates, in particular, to a method for producing subsequent patterns in an underlying layer (120), the method comprising at least a step of producing previous patterns in a printable layer (110) overlying the underlying layer (120), the production of the previous patterns comprising the nanoimprinting of the printable layer (110) and leaving in place a continuous layer formed by the printable layer (110) and covering the underlying layer (120), characterised in that it comprises the following step: at least one step of modifying the underlying layer (120) by ion implantation (421) in the underlying layer (120), the implantation (421) being carried out through the printable layer (110) comprising the subsequent patterns, the implantation (421) parameters being chosen so as to form, in the underlying layer (120), implanted areas (122) and non-implanted areas, the non-implanted areas defining the subsequent patterns and having a geometry that is dependent on the previous patterns.