| 摘要 |
In a polarized light irradiation device which transmits a substrate on a workbench to a luminous plane of polarized light and irradiates polarized light on the substrate, the device can detect generation of yaw and improves rate of finished products. A light irradiator (1) irradiates polarized light on the luminous plane (I) through a polarization component (12), and the workbench (21) moves by a first moving mechanism (22), and thus the substrate (S) carried on the workbench (21) is transmitted through the luminous plane (I). A yaw detection component formed by a laser interferometer (4) detects yaw of the workbench (21) when the yaw detection component moves to the position of the luminous plane (I) in a linear manner. The yaw is rotation around a shaft which is vertical to the luminous plane (I). |
