OPTICAL PROCESSING HEAD, OPTICAL PROCESSING DEVICE, AND CONTROL METHOD AND CONTROL PROGRAM THEREFOR

摘要

Disclosed is an optical processing head with which defects in the optical processing head arising during optical processing are detected in advance. This optical processing head, which processes a processing surface by focusing a ray from a process light source onto the processing surface, is equipped with: a tubular casing enclosing a process ray emitted from the process light source; an inspection ray emission unit arranged inside the tubular casing, and outside of the path of the process ray; and a light-receiving unit arranged inside the tubular casing and outside of the path of the process ray, for receiving the inspection ray emitted from the inspection ray emission unit. A signal obtained from the light-receiving unit is used to inspect contamination of the inner surface of the tubular casing or the concentration of debris flowing into the interior of the tubular casing.