| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator in which output characteristic is adjusted in a high accuracy.SOLUTION: An actuator comprises: capacitive actuators 10L, 10R; and a buckling type displacement expansion mechanism 40 expanding displacement along with expansion/contraction of the capacitive actuator. The buckling type displacement expansion mechanism 40 includes output characteristic adjustment means which adjusts output characteristic. The output characteristic adjustment means consists of a PCS preload mechanism 60 and a piezo preload mechanism 70. The PCS preload mechanism 60 includes a mechanism adjusting a thrust off-set amount of displacement-thrust characteristic of the output part 14.SELECTED DRAWING: Figure 6 |
