Facet mirror device

摘要

A facet mirror device includes a facet element, a support device and a clamping device. The facet element includes a first support section, while the support device comprises a second support section contacting the first support section to support the facet element. The clamping device includes a tensioning element, a first end of the tensioning element being connected to the facet element a second end of the tensioning element being connected to a counter unit. The counter unit includes a third support section, the support device including a fourth support section contacting the third support section to support the counter unit.

主权项

1. A facet mirror device, comprising:
a facet element having a first section; a support device having first and second sections; a counter unit having a first section; and a clamping device comprising a tensioning element having first and second ends, wherein:
the first section of the facet element contacts the first section of the support device to support the facet element;the first end of the tensioning element is connected to the facet element;the second end of the tensioning element is connected to the counter unit;the second section of the support device contacts the first section of the counter unit to support the counter unit;in a clamping state, the tensioning element is under tensile stress so that the first section of the facet element and the first section of the support device are pressed against each other and the first section of the counter unit and the second section of the support device are pressed against each other in a clamping direction to clamp the facet element via a clamping force in a position and an orientation;the first section of the facet element and the first section of the support device define a first axis of rotation of a relative motion between the first section of the facet element and the first section of the support device;the first axis of rotation extends in a first plane transverse to the clamping direction;the first section of the counter unit and the second section of the support device define a second axis of rotation of a relative motion between the first section of the counter unit and the second section of the support device; andthe second axis of rotation extends in a second plane transverse to the clamping direction;the first and second axes of rotation are located at least close to each other.