MEMS dosimeter

摘要

In various embodiments, a dosimeter is employed to passively record a peak pressure (e.g., a peak blast pressure) and/or a maximum acceleration experienced by the dosimeter.

主权项

1. A dosimeter for passively recording an acceleration exposure, comprising:
a plurality of breakable structures formed on a chip, at least one structure being breakable at a different level of acceleration than another structure, at least one of the breakable structures sized differently from another one of the breakable structures and each structure comprising an electrically conductive path constrained thereto that is open-circuited upon breakage of the structure, the electrically conductive paths wired in parallel such that a measurement of a total resistance across the plurality of breakable structures is indicative of an acceleration level experienced by the dosimeter, each electrically conductive path including a first contact point and a second contact point, and wherein breakage of a subset of the structures is indicative of the acceleration experienced by the dosimeter; and a pair of contact pads formed on the chip and connected to the electrically conductive path of each structure through the first contact point and the second contact point such that a first contact pad of the pair of contact pads is connected to the first contact point and a second contact pad of the pair of contact pads is connected to the second contact point.