发明名称 ARRAY SUBSTRATE, ITS MANUFACTURING METHOD AND DISPLAY DEVICE
摘要 The present disclosure provides an array substrate, its manufacturing method and a display device. The array substrate includes a gate electrode, a gate insulation layer formed on the gate electrode, an active layer formed on the gate insulation layer, source/drain electrodes arranged at a layer identical to the active layer, and a pixel electrode arranged at a layer identical to the active layer. The active layer includes a metal oxide semiconductor, and the source/drain electrodes and the pixel electrode each include an ion-implanted metal oxide semiconductor.
申请公布号 US2016322388(A1) 申请公布日期 2016.11.03
申请号 US201615090149 申请日期 2016.04.04
申请人 BOE TECHNOLOGY GROUP CO., LTD. ;HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 MA Jun;HUANG Yinhu;YANG Chengshao;YIN Bingkun;HAN Junhao
分类号 H01L27/12;H01L29/66 主分类号 H01L27/12
代理机构 代理人
主权项 1. An array substrate, comprising: a gate electrode; a gate insulation layer formed on the gate electrode; an active layer formed on the gate insulation layer; source/drain electrodes arranged at a layer identical to the active layer; and a pixel electrode arranged at a layer identical to the active layer, wherein the active layer comprises a metal oxide semiconductor, and the source/drain electrodes and the pixel electrode each comprise an ion-implanted metal oxide semiconductor.
地址 Beijing CN