SPATIAL LIGHT MODULATOR AND METHOD FOR USING THE SAME, MODULATION METHOD, EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To suppress the effect of light from gap regions of plural optical elements of a spatial light modulator.SOLUTION: The spatial light modulator comprises reflection parts 31 of plural mirror elements 30 arranged along a reference plane A1. The spatial light modulator modulates the phase of an incident illumination light beam IL and emits the light. The spatial light modulator further comprises wavelength plates 37Y and 37X, by which the polarization state of an illumination light beam IL3 which enters gap regions 34Y and 34X between two adjacent reflection parts 31 of the plural reflection parts 31 and exits from the gap regions 34Y and 34X is made different from the polarization state of illumination light beams IL1 and IL2 reflected off the reflection part 31.SELECTED DRAWING: Figure 3