| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin processor which can suppress generation of dust and positional deviation of a substrate during rotation.SOLUTION: A spin processor includes a plurality of clamp pins 21 for grasping a substrate W by abutting against the outer peripheral surface thereof with an urging force, a rotation mechanism (e.g., a motor 4) for rotating each clamp pin 21 around the outer periphery of the substrate W, a lifting mechanism 3h for moving a fixed ring magnet 36 up and down in the rotational axis direction of the substrate W, a conversion mechanism 3g for converting the vertical motion of a rotary ring magnet 35, repelling the fixed ring magnet 36, into lateral motion, and a synchronous movement mechanism (e.g., a plurality of child gears 3e or parent gears 3f) for synchronizing the respective clamp pins 21 depending on the lateral motion in any one direction, so as to move against the energizing force in a direction separating from the outer peripheral surface of the substrate W by the same amount, and for synchronizing the respective clamp pins 21 depending on the lateral motion in the other direction by the energizing force, so as to move in a direction approaching the outer peripheral surface of the substrate W by the same amount.SELECTED DRAWING: Figure 1 |
