| 主权项 |
1. A polymer comprising, based on 100 mole percent of total repeat units, 60 to 100 mole percent of photoacid-generating repeat units, wherein each of the photoacid-generating repeat units comprises (a) photoacid-generating functionality and (b) base-solubility-enhancing functionality selected from the group consisting of tertiary carboxylic acid esters, secondary carboxylic acid esters wherein the secondary carbon is substituted with at least one unsubstituted or substituted C6-40 aryl, acetals, ketals, lactones, sultones, alpha-fluorinated esters, beta-fluorinated esters, alpha,beta-fluorinated esters, polyalkyleneglycols, alpha-fluorinated alcohols, and combinations thereof:
wherein the photoacid-generating repeat units have the structurewherein
R1 is independently in each of the repeat units H, F, —CN, C1-10 alkyl, or C1-10 fluoroalkyl; L1 is independently in each of the repeat units —O—, —C(O)—O—, unsubstituted C6-18 arylene, or substituted C6-18 arylene; m is independently in each of the repeat units 0 or 1; L2 is independently in each of the repeat units an unsubstituted or substituted C1-20 hydrocarbylene, wherein the substituted C1-20 hydrocarbylene can, optionally, include one or more in-chain divalent heteroatom-containing groups that is —O—, —S—, —NR2, —PR2—, —C(O)—, —OC(O)O—, —N(R2)C(O)—, —C(O)N(R2)—, —OC(O)N(R2)—, —N(R2)C(O)O—, —S(O)—, —S(O)2—, —N(R2)S(O)2—, —S(O)2N(R2)—, —OS(O)2—, or —S(O)2O—, wherein R2 is H or C1-12 hydrocarbyl; Z− is independently in each of the repeat units sulfonate (—SO3−), sulfonamidate, which is an anion of sulfonamide, —S(O)2N—R3, wherein R3 is H or unsubstituted or substituted C1-12 hydrocarbyl, or sulfonimidate, which is an anion of sulfonamide, —S(O)2N− S(O)2R3, wherein R3 is H or unsubstituted or substituted C1-12 hydrocarbyl; and Q+ is photoacid-generating cation; wherein at least one of L1, L2 (when m is 1), and Q+ comprises the base-solubility-enhancing functionality. |
