| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce a process for forming a peeling layer in a cone material and a process for peeling the peeling layer in the case of forming an emitter. SOLUTION: After a cathode electrode 2 and an insulating layer 4 are formed on a substrate 1 and an opening portion 7 is formed in the insulating layer 4 by etching, a deposition layer 10 forming a gate electrode 2 and an emitter is deposited on the insulating layer 4 so that a cone-like emitter 11 is formed in the opening portion 7. By etching the deposition layer 10 to have a predetermined film thickness, the gate electrode is formed on the insulating layer 4 so as to manufacture an electric field emitting element. Further, a step is formed on the inner wall of the opening portion 7.</p> |
