发明名称 TRAY FOR WAFER
摘要 <p>PROBLEM TO BE SOLVED: To realize a tray adaptive to high-pyroelericity piezoelectric substrates by housing pyroelectric wafers in a recess of the tray base so as to hold them between the recess bottom and through-hole periphery of a tray cover. SOLUTION: A tray base 1 has a double structure having a first recess 2 and second shallow recess 3 formed at the center of the recess 2. To the second shallow recess 3, is to mounted a pyroelectric wafer 4 to be housed. A cover 1 having a circular through-hole window 6 at the center is mounted on the tray base 1 so as to hold the wafer between the window 6 periphery of the cover 7 and second shallow recess 3 bottom and removably fixed to the tray base 1 by screws 8. Thus a tray adaptive to the high-pyroelectric wafer 4 is realized and yield is improved.</p>
申请公布号 JPH10163309(A) 申请公布日期 1998.06.19
申请号 JP19960332712 申请日期 1996.11.27
申请人 TOYO COMMUN EQUIP CO LTD 发明人 OTA HIROMI;KATO SUSUMU
分类号 H01L21/673;H01L21/68;H03H3/02;H03H3/08;(IPC1-7):H01L21/68 主分类号 H01L21/673
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