摘要 |
<p>PROBLEM TO BE SOLVED: To realize a tray adaptive to high-pyroelericity piezoelectric substrates by housing pyroelectric wafers in a recess of the tray base so as to hold them between the recess bottom and through-hole periphery of a tray cover. SOLUTION: A tray base 1 has a double structure having a first recess 2 and second shallow recess 3 formed at the center of the recess 2. To the second shallow recess 3, is to mounted a pyroelectric wafer 4 to be housed. A cover 1 having a circular through-hole window 6 at the center is mounted on the tray base 1 so as to hold the wafer between the window 6 periphery of the cover 7 and second shallow recess 3 bottom and removably fixed to the tray base 1 by screws 8. Thus a tray adaptive to the high-pyroelectric wafer 4 is realized and yield is improved.</p> |