| 摘要 |
<p>PROBLEM TO BE SOLVED: To relieve the inclination of the edge part of a scanning line, etc., in an active matrix type liquid crystal display device, even if an etchant for forming the scanning line, etc., is deteriorated with respect to passage of time. SOLUTION: Five layers of wiring forming films 22a-22e are successively formed on a glass substrate 21. All five layer of the wiring forming films 22a-22e are made of aluminum alloy containing titanium, and the content of titanium is gradually reduced from the lower layer to the upper layer. Then a resist mask is formed and wet-etching is performed. At that time, the smaller the titanium content, the larger the etching rate. Therefore, a scanning line 24, including a gate electrode 24a and a storing capacitance line 25 whose edge parts are step-shaped, can be formed.</p> |
