| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce a loss in simple structure concerning a microstrip type millimeter wave guide. SOLUTION: A groove is provided on a silicon substrate 101 by anisotropic etching and nickel chromium 102 and 105 and gold 103 and 106 are laminated as a ground conductor. By heat-pressing the gold each other, microstrip line structure having shield structure is formed. Because of shield structure, a radiation loss can be reduced. Besides, since no high frequency current almost flows to the layer of nickel chromium required for laminating metal on silicon, a conductor loss can be reduced as well.</p> |
