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发明名称
Elektronenstrahlgerät
摘要
申请公布号
DE69231213(D1)
申请公布日期
2000.08.03
申请号
DE19926031213
申请日期
1992.11.25
申请人
HITACHI SCIENCE SYSTEMS LTD., HITACHINAKA
发明人
OTAKA, TADASHI;OKURA, AKIMITSU;IWAMOTO, HIROSHI;TODOKORO, HIDEO;KOMODA, TSUTOMU;TOBITA, ISSEI
分类号
G01Q30/02;H01J37/28;(IPC1-7):H01J37/28;H01J37/02
主分类号
G01Q30/02
代理机构
代理人
主权项
地址
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