| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an inkjet head with a high yield. SOLUTION: This method of manufacturing the inkjet head comprises a process of forming a recessed section 6b to be a first nozzle hole part 6 on a silicon substrate 30 to be a nozzle substrate 4 by an anisotropic etching process, a process of forming an etching mask 33 at a side face and a bottom face of the recessed section 6b to be at least the first nozzle hole part 6, a process of bonding a support substrate 40 to the silicon substrate 30 on the face having the recessed section 6b formed thereon, a process of rubbing the silicon substrate 30 from the face opposite the face having the support substrate 40 bonded thereto, a process of forming a second nozzle hole part 7 on the rubbed face by an etching process, and a process of separating the support substrate 40 from the silicon substrate 30. COPYRIGHT: (C)2005,JPO&NCIPI
|
