| 摘要 |
PROBLEM TO BE SOLVED: To provide a terminal structure which is prevented from being broken by excessive force and has high sealing property, and a vacuum pump using this terminal structure. SOLUTION: When a control device 400 moves toward a turbo molecular pump body 300, a cylindrical wall 603 of a female connector 600 is fitted in a cavity 504 of a male connector 500. As one end head portion 511a of a male pin 511 gets deeper in connection state, it is inserted in a pin insertion oblong hole 623. Then, when the tip of the cylindrical wall 603 of a control device 400 abuts on the bottom portion 501 of the male connector 500, the female connector 600 having low rigidity on the side of the control device 400 is pushed back against elastic force of a wave-shaped washer 613. Thus, even when excessive force is applied to the female connector 600 and the male connector 500, the force can be eased by deformation of the wave-shaped washer 613, so that the connector is not broken. COPYRIGHT: (C)2007,JPO&INPIT
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