DUAL TECHNOLOGY (CONFOCAL AND INTEREROMETRIC) OPTICAL PROFILOMETER FOR THE INSPECTION AND THREE-DIMENSIONAL MEASUREMENT OF SURFACES

摘要

The device comprises a light source (LED), beam splitters (at least one of which is polarising), illumination pattern generating means (LCOS micro-display) and interchangeable microscope lenses that are conventional lenses that may be used to obtain confocal images and interferometric lenses that may be used to obtain interferometric images. The micro-display can generate a sequence of illumination patterns to obtain confocal images, or total opening of all the illumination pixels to obtain interferometric images. The design is compact and allows rapid measurement, with no contact, of the shape and texture of all types of surfaces on the micrometric and nanometric scales, including structured or stratified samples containing dissimilar materials.