发明名称 |
Rare earth metal member of high surface purity and making method |
摘要 |
<p>By using a rare earth metal having a minimal content of impurity metal element, machining it into a member and cleaning with an organic acid-base capping agent, there is obtained a rare earth metal member composed entirely of a rare earth metal and containing not more than 100 ppm of impurity metal element in a sub-surface zone, which member is characterized by a high surface purity, a large grain size, minimized grain boundaries, and improved halogen resistance or corrosion resistance.</p> |
申请公布号 |
EP1739196(A1) |
申请公布日期 |
2007.01.03 |
申请号 |
EP20060253129 |
申请日期 |
2006.06.16 |
申请人 |
SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
TSUKATANI, TOSHIHIKO;NAKANO, HAJIME;MAEDA, TAKAO |
分类号 |
C22B59/00;C23C14/34;C23F1/30;C23G1/08 |
主分类号 |
C22B59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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