发明名称 Rare earth metal member of high surface purity and making method
摘要 <p>By using a rare earth metal having a minimal content of impurity metal element, machining it into a member and cleaning with an organic acid-base capping agent, there is obtained a rare earth metal member composed entirely of a rare earth metal and containing not more than 100 ppm of impurity metal element in a sub-surface zone, which member is characterized by a high surface purity, a large grain size, minimized grain boundaries, and improved halogen resistance or corrosion resistance.</p>
申请公布号 EP1739196(A1) 申请公布日期 2007.01.03
申请号 EP20060253129 申请日期 2006.06.16
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 TSUKATANI, TOSHIHIKO;NAKANO, HAJIME;MAEDA, TAKAO
分类号 C22B59/00;C23C14/34;C23F1/30;C23G1/08 主分类号 C22B59/00
代理机构 代理人
主权项
地址