DEVELOP DEVICE USING A SONIC WAVE FOR A DEVELOPING PROCESS OF A SEMICONDUCTOR WAFER,申请号KR20000011209-传众专利搜索

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发明名称	DEVELOP DEVICE USING A SONIC WAVE FOR A DEVELOPING PROCESS OF A SEMICONDUCTOR WAFER
摘要
申请公布号	KR100713398(B1)	申请公布日期	2007.05.03
申请号	KR20000011209	申请日期	2000.03.07
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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