| 摘要 |
The present invention allows for a large format substrate plate to move precisely in X, Y and ⊖ Rotary directions with an integrated linear XY mechanism. The mechanism includes X1, X2 stages which are mounted to the moving substrate plate and Y1 and Y2 stages which are mounted to the machine base. The slides of the X and Y stages are connected to each other through a revolute joint. The resulting integrated X,Y mechanism can move the substrate plate in X,Y and Rotary ⊖ directions preferably by motorizing at least three of the four linear stages with feedback encoders and by using computer controller to command the three motorized stages to move to their desired positions. The relationship between the desired position of the substrate in a global XY coordinate system and the motion of each motorized stage is provided through trigonometric transformations which are integral part of this invention. This configuration can also be used to correct translation and rotational positioning errors of the substrate plate using straightness and yaw maps. The mechanism of the present invention may be used to precisely position large format glass substrates in position systems for large substrate process tools. The positioning system includes a base assembly, on which the integrated XY mechanism is mounted. The moving substrate slide may be supported on the base assembly by air bearing pucks or by recirculating rail pucks. Motion in the Y direction may be provided by linear motor coil mounted to at least one of the Y pucks with a magnet mounted to the base surface in Y direction. Motion in the X direction is achieved by one or two X slides mounted to the moving plate which support the substrate in a configuration which includes, two motorized cross stages slides X1 and X2 with encoders which are connected to the Y1 Y2 slides respectively by a unique revolute joint Motion in the ⊖ direction can be achieved by opposite motion of either X1 and X2 stages or Y1 and Y2 stages or in a special double gantry configuration by all four stages where only three axes are independent. The present invention allows multiple mounting configurations of the X, Y stages which allows the user to control very large format substrates in an economic way using standard X,Y stages and low cost structural and sensing components. In addition the present invention allows the user to achieve extreme precision positioning as may be needed for process machines such as printing, laser scribing, machining, inspection and biotechnology assaying of large substrate plates by commanding the motorized stages of the mechanism to move to target position using error mapping and the kinematic formulations of this invention
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