A MODULATOR FOR AN ARRAY TESTER

摘要

A modulator for an array tester is provided to reduce an error of the modulator by preventing a scratch or a crack from being generated on a substrate or the modulator. A modulator for an array tester includes a modulator body(120), and an interval adjustment unit(130). The modulator body is coupled to be lifted on a lower plane of a fixing block, and has a modulator electrode unit(123) and a physical characteristic changing unit(125). The modulator electrode unit forms an electric field between electrodes of a substrate. The physical characteristic changing unit changes a specific physical characteristic based on an intensity of the electric field. The interval adjustment unit is arranged on an outer edge of the modulator body, and adjusts an interval between the substrate and the modulator body. The interval adjustment unit has a chamber unit and a porous unit. The chamber unit receives a pressure from an external. The porous unit is composed of a porous material unit which is coupled to the chamber unit, and provides the pressure from the chamber unit to the substrate through a plurality of minute holes.