MANUFACTURING METHOD OF TASI2-SIC NANOCOMPOSITE COATING

摘要

A new TaSi2-SiC nanocomposite coating layer formed on a surface of tantalum or tantalum alloys is provided to improve isothermal oxidation resistance and repeated oxidation resistance of the coating layer at high temperatures and improve mechanical properties of the coating layer at high temperatures, and a manufacturing method of the nanocomposite coating layer is provided. A manufacturing method of a TaSi2-SiC nanocomposite coating layer comprises the steps of: (a) simultaneously vapor-depositing tantalum and carbon onto a surface of tantalum or tantalum alloys as a matrix to form a TaC coating layer on the surface of the matrix, and forming a Ta2C coating layer on the TaC coating layer; and (b) vapor-depositing silicon onto the surface of the tantalum carbide coating layer to form a TaSi2-(31.5-16) vol.% SiC nanocomposite coating layer, wherein the nanocomposite coating layer is gradient structured such that the SiC volume fraction of the nanocomposite coating layer is reduced as it goes from the matrix side to the surface side.