METHOD OF MANUFACTURING THE ORGANIC LIGHT EMITTING DEVICE, AND ORGANIC LIGHT EMITTING DEVICE MANUFACTURED BY USING THE SAME

摘要

An organic light emitting device and a method for manufacturing the same are provided to extract a light efficiently by having a transparent cathode electrode having a work function of a similar absolute value to a work function of a transparent cathode electrode formed by a conventional sputtering process. A method for manufacturing an organic light emitting display device includes the steps of: forming an anode electrode(110); forming an intermediate layer(130) having a light emitting layer on the anode electrode; and forming a cathode electrode(120) on the intermediate layer. In the step of forming the cathode electrode, a transparent conductive layer, where a metal or a metal oxide is doped on an indium oxide, is formed by a heat-deposition for an indium oxide and a metal or a metal oxide in state of generating plasma in a chamber. In the step of forming the cathode electrode, a heat-deposition for a metal and an indium is performed under oxygen atmosphere.