Integrated electric field sensor

摘要

An electric field sensor includes one or more sensing electrodes connected to an integrated amplifier that bootstraps all parasitic capacitances at the sensor input to provide for a very high input impedance without the need for neutralization or other adjustments and calibration. The integrated amplifier for the electric field sensor further includes low-noise ESD/biasing structures to stabilize the DC-potential of the sensor with a minimum amount of added noise, leakage and parasitic capacitance.

主权项

1. An electric field sensor, comprising:
at least one sensing electrode for detecting an electric field and generating an input signal; a sensor input connected to the at least one sensing electrode for receiving the input signal; an integrated amplifier adapted to generate at least one buffered output signal that replicates the input signal, the integrated amplifier comprising a substrate, a package assembly and a plurality of circuit elements integrated on the substrate and enclosed within the package assembly, each circuit element comprising a plurality of terminals, wherein a first portion of the plurality of terminals is connected to the sensor input; an active shield in electrical communication with an output of the integrated amplifier so that the at least one buffered output signal drives the active shield; and wherein the first portion of the plurality of terminals is shielded from the substrate and the package assembly by a second portion of the plurality of terminals substantially following one of the input signal and the buffered output signal.