发明名称 熱的に安定な光学センサマウント
摘要 Disclosed is an apparatus including a mechanical reference frame and a rigid object mechanically coupled to the reference frame by two or more constraints. The stiffnesses of at least two of the constraints are different from one another, and the relative locations and stiffnesses of the constraints cause a designated point on the rigid object to remain stationary with respect to the reference frame during thermal expansion of the rigid object over a range of temperatures.
申请公布号 JP5922788(B2) 申请公布日期 2016.05.24
申请号 JP20140541273 申请日期 2012.11.08
申请人 ザイゴ コーポレーションZYGO CORPORATION 发明人 バダミ、ヴィベク ジー.
分类号 G01B11/00;G03F7/20;H01L21/027;H01L21/68 主分类号 G01B11/00
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