| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional coordinate measurement device with which it is possible to improve the accuracy of measuring the position in the direction of axis Y of a Y carried, i.e., the accuracy of measuring the Y coordinate value of an object to be measured.SOLUTION: A groove 40 is formed in the right side of a stone surface plate 10 along the direction of axis Y, and a Y guide 42 for supporting a portal Y carriage so as to be movable in the direction of axis Y is formed between the groove 40 and the right-side face 10R of the surface plate 10. The scale 112 of a linear encoder for detecting the position in the direction of axis Y of the Y carriage is installed on the inner surface of the groove 40, and a bellows cover is installed on the upper opening of the groove 40 to cover the upper opening of the groove 40.SELECTED DRAWING: Figure 6 |
