| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method and an inspection apparatus of a hexagonal single crystal, capable of highly accurately detecting a direction in which a c-axis inclines by an off-angle.SOLUTION: The inspection apparatus has laser beam generation means 32 for generating a linear polarization laser beam having a wavelength transmitting through a hexagonal single crystal substrate 11 and a polarization plane in a prescribed direction. The inspection method includes: positioning an upper surface of the substrate 11 perpendicular to a light path of the laser beam and holding the upper surface so that the laser beam transmits through the substrate 11; rotating the substrate 11 relatively to a polarization plane of the laser beam generated by the laser beam generation means with the center of the laser beam as rotation center; branching the laser beam transmitting through the substrate 11 into a P polarization and an S polarization with a polarization beam splitter 38; a calculation step of calculating a light amount ratio of a light amount of the P polarization measured by a first light receiving element to a light amount of the S polarization measured by a second light receiving element; and an inclination detection step of detecting a direction in which the c-axis inclines to a perpendicular line of the upper surface from the relative rotation angle and light amount ratio of the substrate 11 with respect to the polarization plane.SELECTED DRAWING: Figure 3 |
