| 摘要 |
PROBLEM TO BE SOLVED: To suppress self-excited oscillation of a diaphragm without making a poppet valve large-sized.SOLUTION: An exhaust port member 15 is provided with an internal peripheral wall 15d that is slidably inserted into the outer peripheral surface 14c of an end portion located at the output chamber 8 side of a supply air port member 14 and an exhaust introduction passage 15 for communicating between an opening 15a1 and the output chamber 8 when the opening 15a1 facing the output chamber 8 side of an exhaust port 15a is opened by the second valve body 20c of a poppet valve 20. As a result, the lateral position of the exhaust port member 15 (the lateral position of the exhaust port 15a) is restricted by the supply air port member 14 and self-excited oscillation of a diaphragm 4 is suppressed without making the poppet valve 20 large-sized. The displacement volume from the exhaust port 15a is sufficiently secured through an exhaust introduction passage 15g, resulting in smooth pressure adjustment.SELECTED DRAWING: Figure 2 |
