| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak inspection method and the like capable of continuously inspecting a plurality of work in a short time, while keeping an inspection system in a stable state.SOLUTION: An inspection system space (a space downstream an open/close valve 41) is pressurized to be target pressure by gas from a gas introducing portion 10, and then is made to be a sealed space by closing the open/close valve. An inlet of work W is attached with a manual four-way valve 70, and after connected to a preparing connection port 31a to be pressurized to the target pressure, moved and connected to an inspecting connection port 32a by closing the manual four-way valve 70. Then, by opening the manual four-way valve 70 and a manual valve 48, the work W is communicated with the inspection system space, and subjected to leak inspection, and after the inspection, the work W is removed after closing the manual valve 48 and the manual four-way valve 70. Then, the manual four-way valve is opened to decompress the work W. After the work W is separated, the inspection system space is kept in a sealed state until the next work W pressurized is connected to the inspecting connection port 32a, and inspection is successively performed on a plurality of containers.SELECTED DRAWING: Figure 1 |
