OPTICAL DEFLECTION DEVICE, LIGHT IRRADIATION DEVICE, AND DISTANCE MEASUREMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an optical deflection device whose drive power is small.SOLUTION: An optical deflection device comprises: an MEMS mirror capable of being driven around a reference shaft and a slave shaft and capable of reflecting light; drive means for driving the MEMS mirror; detection means for detecting the amplitude and phase of the MEMS mirror; and selection means for selecting the drive frequency and frame rate of the MEMS mirror on the basis of the amplitude and phase of the MEMS mirror detected by the detection means, and outputting the same thus selected to the drive means. The selection means selects the resonance frequency of the reference shaft as a drive frequency of the reference shaft, calculates a candidate combination of a frame rate with which it is possible to provide Lissajous figures that do not overlap within one field and the drive frequency of the slave shaft on the basis of the resonance frequency of the reference shaft, and selects a candidate combination of the frame rate and the drive frequency of the slave shaft that includes a frequency closest to the resonance frequency of the slave shaft from among the candidate combinations of the frame rate and the drive frequency of the slave shaft, thus outputting the selected combination to the drive means.SELECTED DRAWING: Figure 3