发明名称 Semiconductor testing device
摘要 A wafer testing device in which a plurality of wafers can be tested simultaneously significantly reducing the time required for testing each chip. A prober is provided which receives a wafer to be tested. A probe card is coupled to the prober having a window through which a plurality of semiconductor memory chips on the wafer are observable. A plurality of probes are coupled to the periphery of the window in such a manner that the probes can be brought into contact with bonding pads on the plurality of semiconductor memory chips. A tester is connected to the probes which is capable of simultaneously testing each of the plurality of chips.
申请公布号 US4799009(A) 申请公布日期 1989.01.17
申请号 US19830479117 申请日期 1983.03.31
申请人 VLSI TECHNOLOGY RESEARCH ASSOCIATION 发明人 TADA, TETSUO;OKADA, KEISUKE
分类号 G01R31/26;G01R1/073;G01R31/28;H01L21/66;(IPC1-7):G01R1/06;G01R31/02 主分类号 G01R31/26
代理机构 代理人
主权项
地址