THIN FILM FORMING DEVICE,申请号JP19890166898-传众专利搜索

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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPH0336261(A)	申请公布日期	1991.02.15
申请号	JP19890166898	申请日期	1989.06.30
申请人	MITSUBISHI ELECTRIC CORP	发明人	HANAI MASAHIRO
分类号	C23C14/24;C23C14/32	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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