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发明名称
MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号
JPH0335520(A)
申请公布日期
1991.02.15
申请号
JP19890170474
申请日期
1989.06.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
INABA YUTAKA;TOMIKAWA MITSUHIRO
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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