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发明名称
ULTRASONIC CLEANING DEVICE
摘要
申请公布号
JPH0442530(A)
申请公布日期
1992.02.13
申请号
JP19900150287
申请日期
1990.06.08
申请人
FUJITSU LTD
发明人
USUI YOICHI;TAKAHASHI TAKAO
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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